JPS6195736U - - Google Patents
Info
- Publication number
- JPS6195736U JPS6195736U JP18136684U JP18136684U JPS6195736U JP S6195736 U JPS6195736 U JP S6195736U JP 18136684 U JP18136684 U JP 18136684U JP 18136684 U JP18136684 U JP 18136684U JP S6195736 U JPS6195736 U JP S6195736U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- holding
- suction section
- holding device
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 8
- 239000000758 substrate Substances 0.000 claims 8
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18136684U JPH0312751Y2 (en]) | 1984-11-29 | 1984-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18136684U JPH0312751Y2 (en]) | 1984-11-29 | 1984-11-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6195736U true JPS6195736U (en]) | 1986-06-20 |
| JPH0312751Y2 JPH0312751Y2 (en]) | 1991-03-26 |
Family
ID=30738916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18136684U Expired JPH0312751Y2 (en]) | 1984-11-29 | 1984-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312751Y2 (en]) |
-
1984
- 1984-11-29 JP JP18136684U patent/JPH0312751Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0312751Y2 (en]) | 1991-03-26 |